Revolution Semi-Auto Wet Bench

Semi-auto, Multi-Step Wet Processing Equipment

Revolution Wet Processing System is a highly configurable multi-step wet bench. It can be configured for either semi-auto or full-auto applications. The Revolution platform offers up to 5 processing tanks located around its central rotary robot.

Revolution Wet Bench Semi-Automated Wet Process System

For many complex applications, it is the most ideal, low-cost solution for processes that require a multistep sequence. There are numerous advanced features available for process control and monitoring in IDX Flexware. With its robust integrated rotary robot, custom process tank configurations, and unique options RENA creates powerful, versatile platforms that provide reliable solutions that perform year after year. As with all RENA equipment, the platform footprint is always a priority and is kept minimal. The Revolution also provides field-proven, dry-to-dry Genesis technology. As with all RENA systems, the Revolution wet bench is designed so that all critical electrical and mechanical areas are easily accessible and maintenance-friendly.


Applications

Revolution Wet Bench Semi-Automated Wet Process System Applications

Benefits

Revolution Wet Bench Semi-Automated Wet Process System Benefits
  • Custom Tank Layouts and Sequencing
  • Multiple Application Solutions
  • Advanced Process Control
  • Minimal Footprint
  • High Performance
  • High Yield
  • Configurable
  • Low Operating Cost

Technology

Software Screenshot

IDX Flexware
Advanced Process Control

RENA's proprietary IDX Flexware Process Control software provides complete control of all critical processes and conditions through closed-loop monitoring and feedback. IDX Flexware provides advanced capabilities, features, and options that are required for advanced process applications and solutions.

IDX FLEXWARE
PROCESS CONTROL SOFTWARE

FlexView Advanced Process Monitoring

RENA's Flexview software enables equipment and process engineers to review the processing conditions of a specific lot ID at a glance. FlexView software does this by providing a graphic representation of all existing monitored conditions & tolerances, then storing that data in a file that is specific to the Lot ID that was being processed at that time. In the event of a yield loss on a particular lot, the process engineer can quickly identify if the wet station processed that lot within the required specifications. In this way, the system can be much more easily eliminated as a possible cause of the yield loss even. FlexView eliminates the need to interpret large amounts of data in the data log. This creates the opportunity for greater system optimization and process transparency while improving the overall operator experience.

IDX FLEXVIEW
PROCESS MONITORING


Revolution Wet Processing System Options

  • FluidJet™, TruEtch, and SiEtch Technology
  • Megasonic and Ultrasonic Baths
  • Chemical Spiking
  • Recirculation filtration
  • Heater/Chiller
  • Integrated Dryers
  • Full Front Enclosure
  • Customer Specified Process cassette
  • HEPA Filtration
  • Integrated chemical spiking
  • Bulk Chemical System Integration
  • FM4910 (Halar, CPVC, PVDF) or polypropylene or stainless steel
  • Semi S2

RENA Wet Bench Platforms are:

  • Flexible and Upgradeable
  • Easy to Use and Well Controlled
  • Tailored to Customer Spec
  • Production Ready
  • User-friendly and Intuitive
  • Designed for Safety
  • Maintenance Friendly
  • Robust & Reliable
  • Award-winning Support
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