Revolution SEMI-AUTO Wet BENCH
Semi-auto, Multi-Step Wet Processing Equipment
Revolution Wet Processing System is a highly configurable multi-step wet bench. It can be configured for either semi-auto or full-auto applications. The Revolution platform offers up to 5 processing tanks located around its central rotary robot.
For many complex applications, it is the most ideal, low-cost solution for processes that require a multistep sequence. There are numerous advanced features available for process control and monitoring in IDX Flexware. With its robust integrated rotary robot, custom process tank configurations, and unique options RENA NA creates powerful, versatile platforms that provide reliable solutions that perform year after year. As with all RENA NA equipment, the platform footprint is always a priority and kept minimal. The Revolution also provides field-proven, dry-to-dry Genesis technology. As with all MEI systems, the Revolution wet bench is designed so that all critical electrical and mechanical areas are easily accessible and maintenance friendly.
Revolution Wet Bench Features:
- Dry-to-dry Capabilities
- Acid & Solvent Solutions
- Multi-Step Sequences
- Multiple Proprietary Technologies
- Up to 5 Processing Tanks
- 100-200mm wafers
- Robust Rotary Robot
- IDX Flexware Control Software
- HMI Touchscreen
- SECS/GEM Factory Host
- UL508A Electrical
Applications
- Metal Lift-Off with FluidJet™
- InGaP-GaAs Etch
- Post CMP Clean
- Pre-diffusion Clean
- Multiple Oxide Etch
- Solvent Strip
- Developer
- Sulfuric Resist Strip
- FEoL Resist Strip
- BEoL Resist Strip
- Nitride Etch
Benefits
- Custom Tank Layouts and Sequencing
- Multiple Application Solutions
- Advanced Process Control
- Minimal Footprint
- High Performance
- High Yield
- Configurable
- Low Operating Cost
Technology
IDX Flexware
Advanced Process Control
RENA NA's proprietary IDX Flexware Process Control software provides complete control of all critical processes and conditions through closed-loop monitoring and feedback. IDX Flexware provides advanced capabilities, features, and options that are required for advanced process applications and solutions.
IDX FLEXWARE
PROCESS CONTROL SOFTWARE
FlexView Advanced Process Monitoring
RENA NA's Flexview software enables equipment and process engineers to review the processing conditions of a specific lot ID at a glance. FlexView software does this by providing a graphic representation of all existing monitored conditions & tolerances, then storing that data in a file that is specific to the Lot ID that was being processed at that time. In the event of a yield-loss on a particular lot, the process engineer can quickly identify if the wet station processed that lot within the required specifications. In this way, the system can be much more easily eliminated as a possible cause of the yield loss even. FlexView eliminates the need to interpret large amounts of data in the data log. This creates the opportunity for greater system optimization and process transparency while improving the overall operator experience.
IDX FLEXVIEW
PROCESS MONITORING
Revolution Wet Processing System Options
- FluidJet™, TruEtch, and SiEtch Technology
- Megasonic and Ultrasonic Baths
- Chemical Spiking
- Recirculation filtration
- Heater/Chiller
- Integrated Dryers
- Full Front Enclosure
- Customer Specified Process cassette
- HEPA Filtration
- Integrated chemical spiking
- Bulk Chemical System Integration
- FM4910 (Halar, CPVC, PVDF) or polypropylene or stainless steel
- Semi S2
RENA NA Wet Bench Platforms are:
- Flexible and Upgradeable
- Easy to Use and Well Controlled
- Tailored to Customer Spec
- Production Ready
- UL Listed 508A
- User-friendly and Intuitive
- Designed for Safety
- Maintenance Friendly
- Robust & Reliable
- Award-winning Support