Revolution Semi-Auto Wet Bench
Semi-auto, Multi-Step Wet Processing Equipment
Revolution Wet Processing System is a highly configurable multi-step wet bench. It can be configured for either semi-auto or full-auto applications. The Revolution platform offers up to 5 processing tanks located around its central rotary robot.
For many complex applications, it is the most ideal, low-cost solution for processes that require a multistep sequence. There are numerous advanced features available for process control and monitoring in IDX Flexware. With its robust integrated rotary robot, custom process tank configurations, and unique options RENA creates powerful, versatile platforms that provide reliable solutions that perform year after year. As with all RENA equipment, the platform footprint is always a priority and is kept minimal. The Revolution also provides field-proven, dry-to-dry Genesis technology. As with all RENA systems, the Revolution wet bench is designed so that all critical electrical and mechanical areas are easily accessible and maintenance-friendly.
Features and Benefits:
- Dry-to-dry Capabilities
- Acid & Solvent Solutions
- Multi-Step Sequences
- Multiple Proprietary Technologies
- Up to 5 Processing Tanks
- 50-200mm wafers
- Robust Rotary Robot
- IDX Flexware Control Software
- HMI Touchscreen
- SECS/GEM Factory Host
- Custom Tank Layouts and Sequencing
- Multiple Application Solutions
- Advanced Process Control
- Minimal Footprint
- High Performance
- High Yield
- Low Operating Cost
Contact our Experts
We are happy to help our customers find efficient and process-optimized solutions for their wet processing applications.