IDX Flexware

Advanced Process Control Software

RENA's proprietary IDX Flexware Advanced Process Control Software provides complete control of all critical processes and conditions through closed-loop monitoring and feedback. IDX Flexware provides advanced capabilities, features, and options that are required for advanced process applications and solutions.


IDX Flexware is extremely flexible and ideal for many different types of equipment where sophisticated user-interface capabilities are required. IDX Flexware is outstanding for both complex process control and productivity. Many different OEM equipment providers for the semiconductor wet processing utilize IDX Control Software on both their used and new semiconductor equipment. IDX Flexware is widely regarded as an outstanding platform for breathing new life into many of the industry's legacy wet processing systems. IDX Flexware is able to streamline complex applications and processes while providing unparalleled ease of use, all while improving uptime, acquiring reliable real-time data, and outstanding process performance.


DX Flexware Advanced Process Control Software Applications
  • Wafer Cleaning
  • Wafer Stripping
  • Wafer Etching
  • Wafer Metal Lift-Off
  • III-V Compound
  • Solar PV
  • MEMS
  • Medical
  • Drying (Spin Rinse & Marangoni)
  • Bulk Chemical Delivery (Carboy & Drum)


DX Flexware Advanced Process Control Software Benefits
  • Easily Tailored to Customer Specifications
  • Intuitive Graphical Interface
  • Reduced Production Costs
  • Reduced Chemical Consumption
  • Reduced Chemical Waste
  • Field-proven Reliability
  • Award-winning, Worldwide Support


DX Flexware Advanced Process Control Software Options
  • Complete System Upgrades
  • USB Backup
  • FlexView, Advanced Monitoring, and Diagnostics

IDX Flexware - The Industry's Choice

IDX Flexware is the industry's choice for complex, reliable, process control for critical wet processing applications. RENA's solutions for the most critical processes are only capable through IDX Flexware's real-time monitoring, advanced features, reliability, and the ability to integrate into the current hardware schema or legacy system. Real-time monitoring through IDX Flexware, and in-depth analysis through FlexView provide the most comprehensive control package on the market. IDX Flexware is ideal for processes that require product traceability through the entire process, logging all LOT ID data, critical process parameters, limits, and human intervention. Whether it's wet processing, chemical delivery, or an SRD IDX Flexware can provide features that others can't.  IDX Flexware controls every RENA NA system platform ensuring that we are the solution for your processing needs.

DX Flexware Advanced Process Control Software

IDX Flexware on legacy equipment:

  • Semitool
  • Gasonics
  • Akrion
  • Verteq
  • Amerimade
  • Submicron
  • Universal Plastics
  • BPS
  • ChemWest
  • Santa Clara Plastics

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