Evolution Wet Processing System is a full-auto linear semiconductor wet bench. The modular design is highly configurable and able to accommodate any specified process sequence, in fact, multiple sequences.
The Evolution's main feature is high yield, while maintaining a low cost of operation. The full-auto design features dry-to-dry processing with multiple, simultaneous lot batch processing. Running under IDX Flexware control, the Evolution is one of the most advanced wet processing systems in the industry. Unique, advanced features and capabilities, including Lot Scheduling via the "Scheduler", FlexView(optional), Active Queue, multi-step processing, specialized process tanks, Ultrasonic and Megasonic tanks, cascade or quick dump rinsing, chemical injection and spiking, multiple drying options to include RENA NA's Genesis X Marangoni drying, and a robust, reliable transfer robot. As with all RENA NA systems, SECS/GEM compliant factory host capabilities are available. The Evolution is custom tailored to meet your specific process requirements.
It's time to evolve with RENA NA's Full-Auto Wet Processing System, The Evolution.
RENA NA's proprietary IDX Flexware Process Control software provides complete control of all critical processes and conditions through closed-loop monitoring and feedback. IDX Flexware provides advanced capabilities, features, and options that are required for advanced process applications and solutions.
RENA NA's Flexview software enables equipment and process engineers to review the processing conditions of a specific lot ID at a glance. FlexView software does this by providing a graphic representation of all existing monitored conditions & tolerances, then storing that data in a file that is specific to the Lot ID that was being processed at that time. In the event of a yield-loss on a particular lot, the process engineer can quickly identify if the wet station processed that lot within the required specifications. In this way, the system can be much more easily eliminated as a possible cause of the yield loss even. FlexView eliminates the need to interpret large amounts of data in the data log. This creates the opportunity for greater system optimization and process transparency while improving the overall operator experience.
The full-auto Evolution wet bench is available with a variety of options. Configurations are endless including multiple loading method options, heating & chilling, lids, fill methods and upgraded features.
