Advancer Gemini Wet BENCH 

Dual-process, Single-step Immersion Wet Bench

The Advancer Gemini Wet Bench is a dual-process, dual-robot wet processing system. It is one of the most cost-effective platforms available. The Advancer Gemini dual processing takes advantage of sharing not only the IDX Flexware Control system but the required facilities as well.

Single Step Machine

While doubling the processing capacity within a reduced overall footprint, the Advancer Gemini provides twice the attractive features for a relatively low cost. The Advancer Gemini wet bench features all the capabilities of the Advancer Classic wet bench while producing twice the throughput per square foot. The Advancer Gemini wet bench can also be configured for sequential process steps within a single module.


Applications

Applications
  • HF or BOE Etch
  • SC1 (Megasonic)
  • SC2
  • Oxide Etch
  • Resist Strip
  • Nitride Etch
  • BOEL Solvents
  • Advanced MLO
  • InGap Etch

Benefits

Benefits
  • Improved Process Control
  • Reduced DI Water Usage
  • Reduced Chemistry Usage
  • Extended Tank Life
  • Low Cost of Ownership
  • Multiple Models Available
  • Reduced Footprint
  • Maintenance Friendly
  • Easy Installation

Technology

Software Screenshot

IDX Flexware
Advanced Process Control

RENA NA's proprietary IDX Flexware Process Control software provides complete control of all critical processes and conditions through closed-loop monitoring and feedback. IDX Flexware provides advanced capabilities, features, and options that are required for advanced process applications and solutions.

IDX FLEXWARE
PROCESS CONTROL SOFTWARE

FlexView Advanced Process Monitoring

RENA NA's Flexview software enables equipment and process engineers to review the processing conditions of a specific lot ID at a glance. FlexView software does this by providing a graphic representation of all existing monitored conditions & tolerances, then storing that data in a file that is specific to the Lot ID that was being processed at that time. In the event of a yield-loss on a particular lot, the process engineer can quickly identify if the wet station processed that lot within the required specifications. In this way, the system can be much more easily eliminated as a possible cause of the yield loss even. FlexView eliminates the need to interpret large amounts of data in the data log. This creates the opportunity for greater system optimization and process transparency while improving the overall operator experience.

IDX FLEXVIEW
PROCESS MONITORING


Advancer Gemini Wet Processing System Options

  • Many tank and process bath options, including Megasonics and Ultrasonics
  • Heater, chiller, dryer options
  • Spiking, reclaim, lid, overflow weir, recirculation, filter, fill method, agitation, flush and drain options.
  • Wafer carrier and queue pass-on cassette options
  • HEPA or ULPA filters
  • SECS/GEM interface options
  • Bulk chemical supply
  • Integrated chemical spiking
  • Automatic or manual doors
  • Choice of materials, FM4910 (Halar, CPVC, PVDF) or polypropylene or stainless steel
  • SEMI S2-0703 3rd party evaluation audits and FM certified systems

RENA NA Wet Bench Platforms are:

  • Flexible and Upgradeable
  • Easy to Use and Well Controlled
  • Tailored to Customer Spec
  • Production Ready
  • UL Listed 508A
  • User-friendly and Intuitive
  • Designed for Safety
  • Maintenance Friendly
  • Robust & Reliable
  • Award-winning Support
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