VaporDry

RENA NA's VaporDry, Integrated IPA Drying Process displaces water from high aspect ratio features and TSV, effectively drying the most complex surfaces.

VaporDry

The entire process is monitored and controlled by RENA NA's proprietary IDX Process Control software. VaporDry is the ideal solution for 3D Compound Semiconductor and TSV Applications.


Features

VaporDry_2
  • Particle performance < 20 at 0.12μm
  • All EP stainless steel construction
  • Low Complexity
  • Lower IPA Usage
  • Efficient & Clean
  • Robust, reliable, field-proven performance
  • Small Footprint
  • Extremely effective for Teflon cassettes
  • Ideal for drying multiple wafer sizes

Additional Drying Solutions

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RENA NA's wet processing platforms are selected in large part due to their superior process performance and their ability to provide dry-to-dry solutions. RENA NA's Compass Spin Rinse Dryers with IDX Flexware bring features and control that no other SRD can offer. RENA NA's Genesis Marangoni dryers can be integrated into all of RENA NA's major platforms to include the full-auto Evolution and the semi-auto Advancer and Revolution platforms. The expertise to successfully integrate a Marangoni dryer in a semi-automated system is not available from suppliers of equivalent systems. Providing field-proven process data we are able to clearly demonstrate reliable particle performance capabilities for our Genesis, Genesis X, and Genesis Xi integrated drying systems.

Technology

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IDX Flexware
Advanced Process Control

RENA NA's proprietary IDX Flexware Process Control software provides complete control of all critical processes and conditions through closed-loop monitoring and feedback. IDX Flexware provides advanced capabilities, features, and options that are required for advanced process applications and solutions.

IDX FLEXWARE
PROCESS CONTROL SOFTWARE

FlexView Advanced Process Monitoring

Flexview software enables equipment and process engineers to review the processing conditions of a specific lot ID at a glance. FlexView software does this by providing a graphic representation of all existing monitored conditions & tolerances, then storing that data in a file that is specific to the Lot ID that was being processed at that time. In the event of a yield-loss on a particular lot, the process engineer can quickly identify if the wet station processed that lot within the required specifications. In this way, the system can be much more easily eliminated as a possible cause of the yield loss even. FlexView eliminates the need to interpret large amounts of data in the data log. This creates the opportunity for greater system optimization and process transparency while improving the overall operator experience.

IDX FLEXVIEW
PROCESS MONITORING

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