SiEtch Silicon Etch Solutions 

RENA NA's SiEtch, Silicon Etch Advanced KOH Solution 

MEI-SiEtch-Silicon-Etching


Tank Design - Etch Rate Uniformity

  • Tank and Collar materials and design- Cost and Performance
  • Nitrogen Injection dispersion plates
  • Best Temperature Control
  • KOH ports w/ flow regulation

Concentration Controls – Etch rate stability, Endpoint control

  • Software controlled KOH spiking algorithm used with the DI loss sensor to maintain KOH concentration
  • Feed and bleed chemical controls
  • KOH spike reservoirs
  • IDX software controls by closed-loop feedback
  • In line KOH concentration sensor
  • Concentration control by closed-loop sensor feedback

DI Concentration Controls – Etch rate stability

  • Accurate Concentration Control
  • Accurate Chemical & DI Spiking
  • Consumption/Evaporation Compensation

Technology

evolution-wet-bench-flexware-software

IDX Flexware
Advanced Process Control

RENA NA's proprietary IDX Flexware Process Control software provides complete control of all critical processes and conditions through closed-loop monitoring and feedback. IDX Flexware provides advanced capabilities, features, and options that are required for advanced process applications and solutions.

IDX FLEXWARE
PROCESS CONTROL SOFTWARE

FlexView Advanced Process Monitoring

Flexview software enables equipment and process engineers to review the processing conditions of a specific lot ID at a glance. FlexView software does this by providing a graphic representation of all existing monitored conditions & tolerances, then storing that data in a file that is specific to the Lot ID that was being processed at that time. In the event of a yield-loss on a particular lot, the process engineer can quickly identify if the wet station processed that lot within the required specifications. In this way, the system can be much more easily eliminated as a possible cause of the yield loss even. FlexView eliminates the need to interpret large amounts of data in the data log. This creates the opportunity for greater system optimization and process transparency while improving the overall operator experience.

IDX FLEXVIEW
PROCESS MONITORING

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