FluidJet™ Metal Lift-Off Processing  

RENA's Patented Fluidjet™ Metal Lift-Off Processing technology (Patent No. 9,070,631) provides metal removal utilizing precise hydraulic forces with unique robot agitation to maximize coverage resulting in a reliable performance with increased throughput, increased reclaim, and a reduction in chemical usage.


Applications

  • Acetone and IPA Rinse
  • EKC Solvent blends
  • NMP
  • DMSO
  • Intelligent Fluids LisoPure

Solving Key Metal
Lift-Off Issues

  • Low Throughput -  Immersion and Single Chamber Single wafer tools are much slower requiring multiple tools for production needs
  • Scrap Due To Handling - Operators handling wafers to inspect, manually peal or spray off re-deposited metal, Robot transfer arm drift
  • Re-deposition Of Metal - Tanks & Chambers leave metal pieces in suspension in the soak/strip process causing subsequent focus errors in photo and yield loss/shorts
  • Device Damage - Scratching due to metal debris in suspension or being stripped across the wafer contacting devices at relatively high speed and force
  • Equipment Cost - Single wafer tools cost more than $1.5 million for comparable WPH
  • Solvent Usage - High consumption of solvent 1.5 –2.3 L/wafer w/spray @ 1200-1800 PSI Precious Metal Loss - Due to chamber rinse cycles (drain manifold), messy cleanouts (Glitter)
  • High Level Of PM Requirements - Regular metal cleanouts are required to avoid drain valve or filter clogs and flow system component damage due to excessive PM requirements, messy chamber cleanouts, nozzle replacements, robot arm drift realignment with single wafer tools

Benefits

RENA Patented Fluidjet™ Metal Lift-Off Processing Benefits
  • Reduced Damage
  • Improved Lift-Off performance
  • No metal redeposition
  • Fewer suspended particles
  • Eliminates feature erosion and scratches
  • 80% Reduction in Chemical Use
  • Metal Reclaim > 99%
  • Lower cost of ownership
  • Batch immersion eliminates spray control issues
  • Increased Reclaim
  • 99% precious metal capture with integrated filters and screens
  • Accessible and removable screens provide rapid cleanouts
  • 50% Smaller Footprint
  • Efficient fab utilization
  • Easy installation and facilities hook up
  • Higher Reliability
  • Lower PM requirements
  • No spray nozzle changes
  • Reduced scrap
  • No complex wafer handling
  • No backside redeposit
  • 100 WPH Throughput
  • High uptime
  • 98% Tool Availability with No Robot Handling Errors
  • No daily shutdown for maintenance
RENA Patented Fluidjet™ Metal Lift-Off Processing
RENA Patented Fluidjet™ Metal Lift-Off Processing

Technology

RENA Patented Fluidjet™ Metal Lift-Off Processing Technology

IDX Flexware
Advanced Process Control

RENA's proprietary IDX Flexware Process Control software provides complete control of all critical processes and conditions through closed-loop monitoring and feedback. IDX Flexware provides advanced capabilities, features, and options that are required for advanced process applications and solutions.

IDX FLEXWARE
PROCESS CONTROL SOFTWARE

FlexView Advanced Process Monitoring

Flexview software enables equipment and process engineers to review the processing conditions of a specific lot ID at a glance. FlexView software does this by providing a graphic representation of all existing monitored conditions & tolerances, then storing that data in a file that is specific to the Lot ID that was being processed at that time. In the event of a yield loss on a particular lot, the process engineer can quickly identify if the wet station processed that lot within the required specifications. In this way, the system can be much more easily eliminated as a possible cause of the yield loss even. FlexView eliminates the need to interpret large amounts of data in the data log. This creates the opportunity for greater system optimization and process transparency while improving the overall operator experience.

IDX FLEXVIEW
PROCESS MONITORING

Superior Metal Removal Performance

RENA Patented Fluidjet™ Metal Lift-Off Processing Performance
RENA Patented Fluidjet™ Metal Lift-Off Processing Performance
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