Spin Rinse DryerS - Compass Benchtop SRD 

The Compass Benchtop Spin Rinse Dryer (SRD) offers the most advanced features found in today's SRD. For high and low profile cassettes, the Compass SRD is designed to reduce operating costs while meeting and/or exceeding all critical areas to include clean, dry and particle performance specifications.

Dryer Photo

IDX Flexware provides advanced process control features, these features can only be found on the Compass SRD from RENA NA. With greater reliability, performance, and low operating costs coupled with RENA NA's award-winning support, the Compass Spin Rinse Dryer is the drying solution you can trust.


SRD Advantages

Advantages

Low Cost of Ownership

The cost of the annual amount of N2 saved by using the compass SRD is 3.2 million liters of N2 per chamber compared to the other competitors SRD. Average Annual savings is about $2,000 per chamber depending on your price per liter of N2 gas.

  • Designed to reduce facilities cost in all areas
  • Reduction in N2 usage
  • Reduction of DI water usage
  • Reduction in process cycle times, increased throughput

SRD Benefits

Benefit
  • Improved Performance
  • Advanced Process Control & Monitoring
  • Significant N2 Savings
  • Improved Particle Performance
  • Built with trusted, off the shelf components
  • Intuitive Graphical User Interface excluding proprietary components

Superior Static Control

  • Insitu Static management
  • Dissipate residual static charge while inserting or removing the cassette

Vibration Dampening Tunable Technology

  • Brushless DC motor with Hi-res encoder for monitoring RPM & Rotor position
  • Engineered rotors
  • Selected vibration dampeners
  • Proprietary process variables

Technology

Software Screenshot

IDX Flexware
Advanced Process Control

RENA NA's proprietary IDX Flexware Process Control software provides complete control of all critical processes and conditions through closed-loop monitoring and feedback. IDX Flexware provides advanced capabilities, features, and options that are required for advanced process applications and solutions.

IDX FLEXWARE
PROCESS CONTROL SOFTWARE

FlexView Advanced Process Monitoring

RENA NA's Flexview software enables equipment and process engineers to review the processing conditions of a specific lot ID at a glance. FlexView software does this by providing a graphic representation of all existing monitored conditions & tolerances, then storing that data in a file that is specific to the Lot ID that was being processed at that time. In the event of a yield-loss on a particular lot, the process engineer can quickly identify if the wet station processed that lot within the required specifications. In this way, the system can be much more easily eliminated as a possible cause of the yield loss even. FlexView eliminates the need to interpret large amounts of data in the data log. This creates the opportunity for greater system optimization and process transparency while improving the overall operator experience.

IDX FLEXVIEW
PROCESS MONITORING


Compass Spin Rinse Dryer (SRD) Options

  • Host Communications & Factory Automation
  • USB Auto-backup
  • Light tower
  • Auto door
  • Humidity sensor
  • Chemical inject
  • Custom chamber designs
  • Custom carrier designs
  • DI Flowmeter
  • DI & N2 facility boxes
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