RENA's Compass Benchtop Spin Rinse Dryer (SRD) offers the most advanced features found in today's SRD. For high and low-profile cassettes, the Compass SRD provides state-of-the-art cleaning, rinsing, and drying of wafers after wet processing, for chemical or residue removal for high and low-profile cassettes. Compass SRDs are designed to reduce operating costs while meeting and exceeding cleanliness, dryness, and particle performance specifications. Utilizing DI water rinse followed by N2 drying, the Compass SRD's non-contact heating results in cleaner N2 because a filter is positioned after the heater to eliminate direct contact between the N2 and heater.
IDX Flexware provides advanced process control features, these features can only be found on the Compass SRD from RENA. With greater reliability, performance, and low operating costs coupled with RENA's award-winning support, the Compass Spin Rinse Dryer is the drying solution you can trust.
The cost of the annual amount of N2 saved by using the compass SRD is 3.2 million liters of N2 per chamber compared to the other competitor's SRD. Average Annual savings is about $2,000 per chamber depending on your price per liter of N2 gas.
RENA's proprietary IDX Flexware Process Control software provides complete control of all critical processes and conditions through closed-loop monitoring and feedback. IDX Flexware provides advanced capabilities, features, and options that are required for advanced process applications and solutions.
RENA's Flexview software enables equipment and process engineers to review the processing conditions of a specific lot ID at a glance. FlexView software does this by providing a graphic representation of all existing monitored conditions & tolerances, then storing that data in a file that is specific to the Lot ID that was being processed at that time. In the event of a yield loss on a particular lot, the process engineer can quickly identify if the wet station processed that lot within the required specifications. In this way, the system can be much more easily eliminated as a possible cause of the yield loss even. FlexView eliminates the need to interpret large amounts of data in the data log. This creates the opportunity for greater system optimization and process transparency while improving the overall operator experience.
