Spin Rinse Dryers
RENA NA Compass Spin Rinse Dryers are top quality wafer dryers that rinse off any residues left over from a previous process step such as etching, and then dry the wafer.
The Compass SRD family is designed to reduce operating costs while meeting and exceeding cleanliness, dryness and particle specifications.
SPIN. RINSE. DRY. With Confidence. Top Quality Wafer Dryers
The COMPASS SRD offers the most advanced features found in today's SRD. For high and low profile cassettes, the Compass SRD is designed to reduce operating costs while meeting and/or exceeding all critical areas to include clean, dry and particle performance specifications. IDX Flexware provides advanced process control features, these features can only be found on the Compass SRD from RENA NA. With greater reliability, performance, and low operating costs coupled with RENA NA's award-winning support, the Compass Spin Rinse Dryer is the drying solution you can trust.
COMPASS Spin Rinse Dryers (SRD) are offered in the following configurations:
RENA NA Spin Rinse Dryer (SRD) for High and Low Profile Cassettes
Low Operating Cost for Wafer Drying
Designed to reduce facilities cost
- Significant N2 savings
- Off-the shelf parts
- St. Gobain valves
- Rinse to resistivity set point
Low Particle Performance- Clean Dry Wafers
- 10 nozzle DI spray manifold
- High purity St. Gobain pneumatic valve manifolds (off the shelf from any St. Gobain dist.)
- In situ anti-stat management
- Auto rinse cycle
Superior Vibration and Static Control
Vibration is controlled with tunable vibration dampening
- Brushless DC motor with encoder for RPM & position
- Engineered rotors
- Selected vibration dampeners
Performance and Process Control with IDX Flexware
Advanced control with IDX Flexware software
- Most process options of any SRD
- Resistivity
- Anti-stat
- Blanket heaters
- Programmable set point for N2 heater &
temperature monitoring
- 10.4” color touch-screen userinterface
- Host Communications
- Factory Automation
- Data Logging
- USB back-up
High & Low Profile Cassettes