Spin Rinse Dryers

RENA NA Compass Spin Rinse Dryers are top quality wafer dryers that rinse off any residues left over from a previous process step such as etching, and then dry the wafer.

The Compass SRD family is designed to reduce operating costs while meeting and exceeding cleanliness, dryness and particle specifications.

SPIN. RINSE. DRY.  With  Confidence.  Top Quality Wafer Dryers

The COMPASS SRD offers the most advanced features found in today's SRD. For high and low profile cassettes, the Compass SRD is designed to reduce operating costs while meeting and/or exceeding all critical areas to include clean, dry and particle performance specifications. IDX Flexware provides advanced process control features, these features can only be found on the Compass SRD from RENA NA. With greater reliability, performance, and low operating costs coupled with RENA NA's award-winning support, the Compass Spin Rinse Dryer is the drying solution you can trust.

COMPASS Spin Rinse Dryers (SRD) are offered in the following configurations:

Compass Benchtop
Spin Rinse Dryer

Compass Stand-Alone
Spin Rinse Dryer

Compass Dual Stand-Alone
Spin Rinse Dryer

PowderCoated-SRD-Benchtop-RightSide PowderCoated-SRD2 compass-spin-rinse-dryer-dual-stand-alone-srd

RENA NA Spin Rinse Dryer (SRD) for High and Low Profile Cassettes

Low Operating Cost for Wafer Drying

Designed to reduce facilities cost

Low Particle Performance- Clean Dry Wafers

Superior Vibration and Static Control

Vibration is controlled with tunable vibration dampening

Performance and Process Control with IDX Flexware

Advanced control with IDX Flexware software

High & Low Profile Cassettes


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