Spin Rinse Dryers

RENA NA Compass Spin Rinse Dryers are top quality wafer dryers that rinse off any residues left over from a previous process step such as etching, and then dry the wafer.

The Compass SRD family is designed to reduce operating costs while meeting and exceeding cleanliness, dryness and particle specifications.

SPIN. RINSE. DRY.  With  Confidence.  Top Quality Wafer Dryers

The COMPASS SRD offers the most advanced features found in today's SRD. For high and low profile cassettes, the Compass SRD is designed to reduce operating costs while meeting and/or exceeding all critical areas to include clean, dry and particle performance specifications. IDX Flexware provides advanced process control features, these features can only be found on the Compass SRD from RENA NA. With greater reliability, performance, and low operating costs coupled with RENA NA's award-winning support, the Compass Spin Rinse Dryer is the drying solution you can trust.

COMPASS Spin Rinse Dryers (SRD) are offered in the following configurations:

Compass Benchtop Spin Rinse Dryer	Compass Stand-Alone Spin Rinse Dryer	Compass Dual Stand-Alone Spin Rinse Dryer

RENA NA Spin Rinse Dryer (SRD) for High and Low Profile Cassettes

Low Operating Cost for Wafer Drying

Designed to reduce facilities cost

• Significant N2 savings
• Off-the shelf parts
• St. Gobain valves
• Rinse to resistivity set point

Low Particle Performance- Clean Dry Wafers

• 10 nozzle DI spray manifold
• High purity St. Gobain pneumatic valve manifolds (off the shelf from any St. Gobain dist.)
• In situ anti-stat management
• Auto rinse cycle

Superior Vibration and Static Control

Vibration is controlled with tunable vibration dampening

• Brushless DC motor with encoder for RPM & position
• Engineered rotors
• Selected vibration dampeners

Performance and Process Control with IDX Flexware

Advanced control with IDX Flexware software

• Most process options of any SRD
  • Resistivity
  • Anti-stat
  • Blanket heaters
• Programmable set point for N2 heater &
  temperature monitoring
• 10.4” color touch-screen userinterface
• Host Communications
• Factory Automation
• Data Logging
• USB back-up

High & Low Profile Cassettes

• 50mm to 300mm