RENA actively engages you in a Partnership Design Process, gathering all the requirements and parameters for success – whether your business needs custom semiconductor equipment, wet process tools, wet benches, or chemical delivery systems.
We strive to understand not only your specifications but also your application and we will work to creatively design solutions that meet or exceed your needs.
Using the latest tools for 3-dimensional modeling, 3-D designs are created for all wet process and chemical delivery systems. An important RENA advantage, the designs show all components positioned in the model, providing a design preview and complete documentation for post-installation maintenance, and ensuring consistent performance over many units. Creating 3-D models in the design phase pays off with the highest level of precision and control.
In addition, 3-D modeling ensures complete and accurate documentation, which is delivered to the customer, and ensures that the build matches the approved design exactly.
Each process is unique, each RENA Wet Process System or Wet Bench needs specialized tanks and baths. RENA can handle any process chemistry, including, HF, KOH, HNA, HCL, Piranha. RENA has the ability to custom fabricate our own designs (or your design) from most plastics and metals, and we can provide custom-modified OEM molded tanks from quartz, Teflon, and other plastics.
We offer OEM Megasonic cleaning and Ultrasonic cleaning options as well. Megasonic cleaning, Ultrasonic baths, and tanks are options for our Wet Bench Semiconductor Processing Equipment, including megasonic rinse stations. Adding OEM Megasonic cleaning tanks and Ultrasonic baths provides a high level of cleaning performance by applying high-frequency energy to remove submicron particles via acoustic cavitation.
RENA's transfer robots are a key element of our Wet Benches and Wet Process Systems. The RENA transfer robot design was originally developed based on our experience with field repairs of other OEM wet-bench robots and our own ideas for ease of maintenance. Key components and assemblies of the RENA wet bench transfer robot consist of Commercial-of-the-Shelf (COTS) components. The robot design currently utilizes the same motor for the horizontal and vertical axis and the same sensors as our other transfer robots. The robot controller and drives are the same for both our linear and rotary robot platforms. RENA Wet Bench Transfer Robots do not contain any proprietary circuit boards, motors, actuators, or gearboxes; all COTS components are readily purchased by our customers directly from the OEM.
The safety and well-being of the operator are imperative. We have worked extensively with tool operators, maintenance technicians, and safety/ergonomic engineers to develop the best-in-class weight transfer systems and safety solutions. In addition to our advanced platforms, we provide solutions and upgrades for outdated, unsupported systems such as Verteq, SCP, Amerimade, and a wide range of other OEM legacy semiconductor equipment.
RENA provides an equipment operations manual and complete design documentation with all new wet process benches, Batch Spray Tools, Spin Rinse Dryers, and chemical delivery systems, all in digital format. Your custom-built RENA wet process system will be fully tested at RENA's facility, in a Class 100 clean room using DI water prior to shipment. As the new owner, you are welcome to participate in this testing. Additionally, you are invited to submit any special requirements to us for incorporation into the test plan and be present at the source inspection. We also offer a video source option where we film the operation of the tool, and identify each and every sub-assembly and critical area with screenshots of the IDX Flexware Control Software. Once the RENA system has been installed, hooked up, and debugged in your facility, our professional-site staff will provide operational training to your employees, and then assist them with the pre-production qualification of the system using full chemistry.
Once the RENA system is in production operation, all ongoing technical assistance is only a phone call away and is free of charge for the life of the system. Our full warranty support provides on-site assistance from a local service center or from our factory (if the need ever arises) and is free of charge for the duration of the warranty.
