Spin Rinse Dryer Upgrades
Refurbishment service packages for Semitool and Verteq Spin Rinse Dryers
RENA NA has been refurbishing legacy equipment for over 25 years. Breathing new life into unsupported, outdated equipment is what RENA NA specializes in.
By introducing the latest in technology, hardware, and software, your SRD will perform better than it ever has. Through IDX Flexware advanced features are made available to completely control, monitor and analyze all critical steps in the drying process.
Complete Refurbishment
- Replaces old, non-graphical display with the new color touchscreen
- New IDX Flexware Control Software
- Windows 7 based PC
- Bowl Refinished and Electro-polished
- NEW vibration dampeners
- NEW Adapter seal (uses CDA reduces N2 usage by 50%)
- NEW DI water manifold gasket
- NEW rear bowl seal (Viton®)
- NEW high flow, low-pressure nozzles
- NEW N2 cartridge heater
- NEW bowl blanket heater with OT and AT temp thermal switches
- NEW ST Gobain N2 and DI water valve assembly
- NEW Teflon® drain tube
- NEW Teflon® supply lines (3/8” OD)
- Electro-polish and balance rotor
- NEW window
- NEW door seal (Viton®)
- Solenoids checked
- NEW nylon barbed pneumatic fittings
- Hinge bearings cleaned and checked
- Anti-stat cleaned and checked
- Rear cam cleaned and checked
- RSP cleaned and checked
- New Motor and Motor controller with encoder for rpm control
- User Interface 10.4 in color touch screen
- Unlimited Recipes
- Multi-level Passwords for process, engineering, and operators
- EPO Front and Back
- Warranty: 1-Year parts only, no labor (covers only parts replaced by MEI)
Ask us about the N2 Savings upgrades we can provide for your Semitool SRD!
RENA NA also provides Rotor support to include:
- Magnum and Spectrum Rotors
- Rotor and Clamshell Rotor Service
VERTEQ Support
- Verteq VcS Wet Process Systems
- Verteq Cobra Wet Process Systems
- Verteq ES200 Wet Process Systems
- Verteq SRD, (Verteq spin rinse dryer)
*Verteq" is a registered trademark Marteq. MEI LLC is not affiliated with Marteq Process Solution in any way, nor does Marteq Process Solutions endorse any product of MEI LLC.
Popular SRD upgrades include:
- IDX Flexware Process Control
- Upgrade automation, motion and/or robotic controls
- Accommodate larger wafers
- Improve ergonomics
- Upgrade chemical systems and processes
- Upgrade electrical systems
- Improve ventilation and safety features
RENA NA provides additional services:
- Onsite or off-site repairs & training
- Custom parts, sub-assemblies, and spare parts lists
