Legacy Upgrades & Refurbishments
Refurbishment service packages for Semitool and Verteq Spin Rinse Dryers
RENA offers experience and quality service for your OEM equipment. We can extend the life of your wet processing system, batch spray system, spin rinse dryer or chemical delivery system.
Many of our upgrades not only breathe new life into your equipment but introduce advanced control and monitoring features, increase yield, lower operating costs, and allow for lower MTTR due to part availability.
Included Systems:
- Semitool
- Verteq
- Akrion
- Amerimade
- SubMicron Systems
- Santa Clara Plastics
- Universal Plastics
- and a wide range of other semiconductors wet bench equipment.
Reasons to upgrade:
- Save money by extending the useful life
- Improve throughput or yield
- Refurbish unsupported equipment
- Upgrade automation, motion, and/or robotic controls
- Accommodate larger wafers
- Improve ergonomics
- Upgrade chemical systems and processes
- Upgrade electrical systems
- Improve ventilation and safety features
Available upgrades:
Software, Automation, Motion Control, and Robotics
- Upgrade from manual to semi-automatic processing
- Upgrade, rebuild, or refurbish robots and robotic controllers
- Install new controls with IDX Automation Software
- Upgrade operator process interface -easier for operators to learn and use
- Providing better process monitoring and control
- Providing easier access and maintenance of the tool
- Add control systems—PLC and cell controllers
- New robots with off-the-shelf parts
Chemical Systems & Process Upgrades
- Increase wafer size up to 300 mm
- Refurbish or replace chemical tanks and baths
- Modify process layout of chemical and rinse tanks
- Change materials to quartz, PTFE, Halar, and Teflon
- Upgrade controls, plumbing, and electronics
- Integrate megasonics, ultrasonics, nitrogen, or mechanical agitation
- Upgrade to FM4910 enclosures
- Upgrade level sensors
- Add scales to include mixing capability
- Add chemical spiking and/or concentration monitoring and control
- Convert from manual fill to bulk fill
Electrical Upgrades
RENA is a UL508A Panel Shop
- System updated to meet current NFPA standards and/or local electrical code
- Modern, more advanced power-efficient devices
- Modifications to AC Power requirements due to new FAB locations
- In-line Heaters and Heat Exchangers
- Include heater/chillers, enclosures, pumps and compressor, and probes, sensors, and switches
- Temperature controllers to include heater circuit control and safety circuits
Ventilation and Safety Upgrades
- Exhaust collars
- Exhaust Relocation and/or Monitoring and Control
- Fire Detect & Suppression Systems
- Tank Lids, Fume control, and Enclosures
- Condensing systems
Ergonomic Upgrades
- New ergonomic loading systems and options
- Ergonomic-friendly User Interface options
- Multiple HMI locations
Warranty Options
Most RENA reconditioning work is performed with a 1-year warranty. Multi-year warranties are available as options on some types of system upgrades and retrofits.
Support
- Full start-up, testing, and training are available
- RENA's award-winning support and our technical services ensure the best possible operation and process results from wet process improvements.
